TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Steudel, Max A1 - Kleefoot, Max-Jonathan A1 - Funken, Sebastian A1 - Banholzer, Alexander A1 - Wolf, Mario A1 - Schuhmacher, Silvia A1 - Morgner, Uwe A1 - Harth, Anne T1 - Noninvasive characterization methods for ultra-short laser pulse induced volume modifications JF - Optics Express N2 - We present two noninvasive characterization methods to investigate laser induced modifications in bulk fused silica glasses. The methods discussed are immersion microscopy and scanning acoustic microscopy (SAM). SAM shows merits in measuring the distance from sample surface to the first detectable density change of the modification, while immersion microscopy offers a look into the modification. Both noninvasive methods are preferred over conventional polishing or etching techniques due to the facts, that multiple investigations can be done with only one sample and lower time expenditure. The type II modifications were introduced by focusing laser pulses with high repetition rates into the fused silica. Y1 - 2024 UN - https://nbn-resolving.org/urn:nbn:de:bsz:944-opus4-32678 U6 - https://doi.org/10.1364/OE.515308 DO - https://doi.org/10.1364/OE.515308 VL - 32 IS - 11 SP - 19221 EP - 19229 S1 - 9 ER -