Selina Burkert et.al.: Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures. In: Metrology, 4 (2024), 4, pp. 673-694.
DOI: https://doi.org/10.3390/metrology4040040
URN: urn:nbn:de:bsz:944-opus4-33238