@inproceedings{KuksoRascherBoerretetal.2018, author = {Olga Kukso and Rolf Rascher and Rainer B{\"o}rret and Mario Pohl}, title = {On the metrology of the MSF errors}, series = {Fifth European Seminar on Precision Optics Manufacturing}, editor = {Rolf Rascher and Oliver F{\"a}hnle}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {9781510622708}, doi = {10.1117/12.2318675}, year = {2018}, language = {de} }