TY  - CONF
A1  - Kukso, Olga
A1  - Rascher, Rolf
A1  - Börret, Rainer
A1  - Pohl, Mario
A2  - Rascher, Rolf
A2  - Fähnle, Oliver
T1  - On the metrology of the MSF errors
T2  - Fifth European Seminar on Precision Optics Manufacturing
Y1  - 2018
UR  - https://opus-htw-aalen.bsz-bw.de/frontdoor/index/index/docId/806
SN  - 9781510622708
PB  - SPIE
CY  - Bellingham, Washington, USA
ER  -