TY - CHAP U1 - Konferenzveröffentlichung A1 - Kukso, Olga A1 - Rascher, Rolf A1 - Börret, Rainer A1 - Pohl, Mario ED - Rascher, Rolf ED - Fähnle, Oliver T1 - On the metrology of the MSF errors T2 - Fifth European Seminar on Precision Optics Manufacturing Y1 - 2018 SN - 9781510622708 SB - 9781510622708 U6 - https://doi.org/10.1117/12.2318675 DO - https://doi.org/10.1117/12.2318675 PB - SPIE CY - Bellingham, Washington, USA ER -