TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Kukso, Olga
A1  - Rascher, Rolf
A1  - Pohl, Mario
A1  - Boerret, Rainer
ED  - Fähnle, Oliver
ED  - Fütterer, Gerald
ED  - Rascher, Rolf
ED  - Haberl, Alexander
T1  - On the metrology and analysis of MSF error
T2  - Seventh European Seminar on Precision Optics Manufacturing
Y1  - 2020
U6  - https://doi.org/10.1117/12.2566251
DO  - https://doi.org/10.1117/12.2566251
ER  -