@inproceedings{GentnerBreitenbachNeitzeletal.2022,
  author    = {Gentner, Tobias and Breitenbach, Johannes and Neitzel, Timon and Schulze, Jacob and Buettner, Ricardo},
  title     = {A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing},
  booktitle = {46th IEEE Annual Computers, Software, and Applications Conference},
  doi       = {10.1109/COMPSAC54236.2022.00169},
  institution = {Wirtschaftswissenschaften},
  pages     = {1081 -- 1086},
  year      = {2022},
  language  = {en}
}