TY  - CPAPER
U1  - Konferenzveröffentlichung
A1  - Gentner, Tobias
A1  - Breitenbach, Johannes
A1  - Neitzel, Timon
A1  - Schulze, Jacob
A1  - Buettner, Ricardo
T1  - A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing
T2  - 46th IEEE Annual Computers, Software, and Applications Conference
Y1  - 2022
U6  - https://doi.org/10.1109/COMPSAC54236.2022.00169
DO  - https://doi.org/10.1109/COMPSAC54236.2022.00169
SP  - 1081
EP  - 1086
ER  -