@inproceedings{H{\"o}flerSchneckenburgerBrohmannetal.2022,
  author    = {H{\"o}fler, Sven and Schneckenburger, Max and Brohmann, Maximilian and Harrison, David and Stickel, Franz-Josef and Aziz-Lange, Kathrin and B{\"o}rret, Rainer},
  title     = {Study of the temperature behaviour in the polishing gap for different combinations of polishing pads and slurries},
  booktitle = {European Society for Precision Engineering and Nanotechnology, Conference Proceedings},
  url       = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145606329\&partnerID=40\&md5=e0b37a628aeefd3abd5843547ea34985},
  institution = {Weitere Einrichtungen},
  pages     = {509 -- 512},
  year      = {2022},
  language  = {en}
}