TY  - CPAPER
U1  - Konferenzveröffentlichung
A1  - Höfler, Sven
A1  - Schneckenburger, Max
A1  - Brohmann, Maximilian
A1  - Harrison, David
A1  - Stickel, Franz-Josef
A1  - Aziz-Lange, Kathrin
A1  - Börret, Rainer
T1  - Study of the temperature behaviour in the polishing gap for different combinations of polishing pads and slurries
T2  - European Society for Precision Engineering and Nanotechnology, Conference Proceedings
Y1  - 2022
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145606329&partnerID=40&md5=e0b37a628aeefd3abd5843547ea34985
SP  - 509
EP  - 512
ER  -