@inproceedings{KuksoRascherBoerretetal.2018, author = {Kukso, Olga and Rascher, Rolf and B{\"o}rret, Rainer and Pohl, Mario}, title = {On the metrology of the MSF errors}, series = {Fifth European Seminar on Precision Optics Manufacturing}, booktitle = {Fifth European Seminar on Precision Optics Manufacturing}, editor = {Rascher, Rolf and F{\"a}hnle, Oliver}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {9781510622708}, doi = {10.1117/12.2318675}, year = {2018}, language = {de} }