Open Access

Selina Burkert, Lukas Schwörer, Tim Schubert, Jana Grundmann, David Stein, Andreas Heinrich

• In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the structure geometry directly or via its functionality indirectly. This study investigates various measurement techniques aimed at assessing these structures from 200 nm up to 20 µm. Environmental scanning electron microscopy (ESEM), white light interferometry (WLI), atomic force microscopy (AFM), micro computed tomography (µCT), optical coherence tomography (OCT), phase contrast microscopy (PCM), and Mueller matrix ellipsometry (MME) are investigated for their practical limits of lateral resolution and aspect ratio. The impact of the specimens’ complexity factors, including structure width and aspect ratio, on measurement quality is discussed. A particular focus of this study is on the suitability of different measurement systems for evaluating undercuts and enclosed structures while considering structure size, slant angle, and cover thickness. The aim is to discuss the specific advantages of the individual measurement systems and their application areas in order to be able to quickly select suitable measurement systems for a non-destructive evaluation of polymer-based micro and nanostructures.