Volltext-Downloads (blau) und Frontdoor-Views (grau)

Investigation of the Measurement Systems’ Suitability for the Non-Destructive Measurement of Complex Polymer-Based Micro and Nanostructures

  • In the fabrication of optical polymer-based components, such as diffractive gratings and waveguides, high throughput and high precision are required. The non-destructive evaluation of these complex polymer-based structures is a significant challenge. Different measurement techniques can measure the structure geometry directly or via its functionality indirectly. This study investigates various measurement techniques aimed at assessing these structures from 200 nm up to 20 µm. Environmental scanning electron microscopy (ESEM), white light interferometry (WLI), atomic force microscopy (AFM), micro computed tomography (µCT), optical coherence tomography (OCT), phase contrast microscopy (PCM), and Mueller matrix ellipsometry (MME) are investigated for their practical limits of lateral resolution and aspect ratio. The impact of the specimens’ complexity factors, including structure width and aspect ratio, on measurement quality is discussed. A particular focus of this study is on the suitability of different measurement systems for evaluating undercuts and enclosed structures while considering structure size, slant angle, and cover thickness. The aim is to discuss the specific advantages of the individual measurement systems and their application areas in order to be able to quickly select suitable measurement systems for a non-destructive evaluation of polymer-based micro and nanostructures.

Export metadata

frontdoor_export_ascii

Additional Services

Search Google Scholar

Statistics

frontdoor_oas
Metadaten
Author:Selina Burkert, Lukas Schwörer, Tim SchubertORCiD, Jana GrundmannORCiD, David SteinORCiD, Andreas Heinrich
URN:urn:nbn:de:bsz:944-opus4-33238
DOI:https://doi.org/10.3390/metrology4040040
Source Title (English):Metrology
Document Type:Article
Language:English
Year of Completion:2024
Release Date:2024/11/21
Volume:4
Issue:4
Number of Pages:22
First Page:673
Last Page:694
Faculty:Optik und Mechatronik
Open Access:Open Access
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International