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On the metrology of the MSF errors
Author: | Olga Kukso, Rolf Rascher, Rainer Börret, Mario Pohl |
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Institutional Author: | Rainer Börret |
DOI: | https://doi.org/10.1117/12.2318675 |
ISBN: | 9781510622708 |
Source Title (German): | Fifth European Seminar on Precision Optics Manufacturing |
Conference Date: | 4 October - 4 November 2018 |
Conference Place: | Teisnach, Germany |
Publisher: | SPIE |
Place of publication: | Bellingham, Washington, USA |
Editor: | Rolf Rascher, Oliver Fähnle |
Document Type: | Conference Proceeding |
Language: | German |
Year of Completion: | 2018 |
Release Date: | 2019/08/22 |
Series Title / Number: | Proceedings of SPIE / 10829 |
Faculty: | Optik und Mechatronik |