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On the metrology of the MSF errors

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Metadaten
Author:Olga Kukso, Rolf Rascher, Rainer Börret, Mario Pohl
Institutional Author:Rainer Börret
DOI:https://doi.org/10.1117/12.2318675
ISBN:9781510622708
Source Title (German):Fifth European Seminar on Precision Optics Manufacturing
Conference Date:4 October - 4 November 2018
Conference Place:Teisnach, Germany
Publisher:SPIE
Place of publication:Bellingham, Washington, USA
Editor:Rolf Rascher, Oliver Fähnle
Document Type:Conference Proceeding
Language:German
Year of Completion:2018
Release Date:2019/08/22
Series Title / Number:Proceedings of SPIE / 10829
Faculty:Optik und Mechatronik