A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing
Author: | Tobias Gentner, Johannes Breitenbach, Timon Neitzel, Jacob Schulze, Ricardo Buettner |
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DOI: | https://doi.org/10.1109/COMPSAC54236.2022.00169 |
Source Title (English): | 46th IEEE Annual Computers, Software, and Applications Conference |
Conference Name: | COMPSAC |
Conference Date: | 27 Juni - 1 Juli |
Conference Place: | Los Alamitos |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2022 |
Release Date: | 2025/01/20 |
First Page: | 1081 |
Last Page: | 1086 |
Faculty: | Wirtschaftswissenschaften |
Open Access: | Closed Access |