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A Systematic Literature Review of Machine Learning Applications for Process Monitoring and Control in Semiconductor Manufacturing

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Metadaten
Author:Tobias Gentner, Johannes Breitenbach, Timon Neitzel, Jacob Schulze, Ricardo Buettner
DOI:https://doi.org/10.1109/COMPSAC54236.2022.00169
Source Title (English):46th IEEE Annual Computers, Software, and Applications Conference
Conference Name:COMPSAC
Conference Date:27 Juni - 1 Juli
Conference Place:Los Alamitos
Document Type:Conference Proceeding
Language:English
Year of Completion:2022
Release Date:2025/01/20
First Page:1081
Last Page:1086
Faculty:Wirtschaftswissenschaften
Open Access:Closed Access