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Study of the temperature behaviour in the polishing gap for different combinations of polishing pads and slurries

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Metadaten
Author:Sven Höfler, Max Schneckenburger, Maximilian Brohmann, David Harrison, Franz-Josef Stickel, Kathrin Aziz-Lange, Rainer Börret
URL:https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145606329&partnerID=40&md5=e0b37a628aeefd3abd5843547ea34985
Source Title (English):European Society for Precision Engineering and Nanotechnology, Conference Proceedings
Conference Name:EUSPEN
Conference Date:30 Mai - 3 Juni
Conference Place:Geneva
Document Type:Conference Proceeding
Language:English
Year of Completion:2022
Release Date:2025/01/21
First Page:509
Last Page:512
Faculty:Weitere Einrichtungen
Open Access:Closed Access