Study of the temperature behaviour in the polishing gap for different combinations of polishing pads and slurries
Author: | Sven Höfler, Max Schneckenburger, Maximilian Brohmann, David Harrison, Franz-Josef Stickel, Kathrin Aziz-Lange, Rainer Börret |
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URL: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85145606329&partnerID=40&md5=e0b37a628aeefd3abd5843547ea34985 |
Source Title (English): | European Society for Precision Engineering and Nanotechnology, Conference Proceedings |
Conference Name: | EUSPEN |
Conference Date: | 30 Mai - 3 Juni |
Conference Place: | Geneva |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2022 |
Release Date: | 2025/01/21 |
First Page: | 509 |
Last Page: | 512 |
Faculty: | Weitere Einrichtungen |
Open Access: | Closed Access |